منابع مشابه
15. Nanomechanical Cantilever Array Sensors
Microfabricated cantilever sensors have attracted much interest in recent years as devices for the fast and reliable detection of small concentrations of molecules in air and solution. In addition to application of such sensors for gas and chemicalvapor sensing, for example as an artificial nose, they have also been employed to measure physical properties of tiny amounts of materials in miniatu...
متن کاملRapid functionalization of cantilever array sensors by inkjet printing
The controlled deposition of functional layers is the key to converting nanomechanical cantilevers into chemical or biochemical sensors. Here, we introduce inkjet printing as a rapid and general method to coat cantilever arrays efficiently with various sensor layers. Self-assembled monolayers of alkanethiols were deposited on selected Au-coated cantilevers and rendered them sensitive to ion con...
متن کاملMems cantilever sensors pdf
S.Z. cantilevers are made using a simple one-mask fabrication process with.characterization of a cantilever-type MEMS chemical sensor for detection of chemicals. MEMS has been with the advancement of cantilever-type sensors.sensor. The mechanical structure is a cantilever, having its own resonant frequency. MEMS cantilevers can be as thin as a few nanometers with lengths.Cantilever-based Sensor...
متن کاملEnhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors
Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS resonators have become an important issue because they allow frequency stability improvement, there...
متن کاملThermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy
In this paper, we apply a digital holographic microscope (DHM) in conjunction with stroboscopic acquisition synchronization. Here, the temperature-dependent decrease of the first resonance frequency (S₁(T)) and Young's elastic modulus (E₁(T)) of silicon micromechanical cantilever sensors (MCSs) are measured. To perform these measurements, the MCSs are uniformly heated from T₀ = 298 K to T = 450...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Materials Today
سال: 2005
ISSN: 1369-7021
DOI: 10.1016/s1369-7021(05)00792-3